Semiconductor Tool OEMs:Sensor Bus Design

The Client: Applied Materials, Veeco, Watkins Johnson, Varian, LAM, SVG and others. The Requirement: Replace traditional sensors with devices utilizing next generation sensor bus technologies with advanced on board intelligence. Reduce installation costs by reducing wiring and provide flexibility to support customer specials. Reduce downtime by integrating on board calibration and diagnostic capabilities.

The Design Solution:

Developed pressure and flow sensors with a modular DeviceNet or LonWorks adapter. Participating in ODVA and SEMI industry standards committee to develop software device models to promote interoperability among devices. Worked with most major tool OEMs to collect requirements and review system designs.

Designed devices that comply with draft standards and successfully passed conformance testing and ironman testing on pilot tools.

Controls contractor for complete building automation system, including central equipment room, offices and manufacturing and lab areas. The utilities supported included room air, class 1000 clean rooms, smoke evacuation, lab exhaust, water, compressed air, lighting, and interface to fire control system. Provided turnkey package with programming, panel fabrication, site installation and startup services. The system included 3500 I/O points.